Overview
Introduction to silicon VLSI technology. Future trends in VLSI technology. Technology limitations. Basic technology modules include: crystal growth and wafer preparation; mask generation techniques; lithography; diffusion process; ion implantation; oxidation; etching techniques - wet etching and plasma etching; thin film deposition - epitaxial growth, chemical vapor deposition techniques, metallisation; clean … For more content click the Read More button below.
Exclusion Courses
Delivery
In-person - Standard (usually weekly or fortnightly)
Pre-2019 Handbook Editions
Access past handbook editions (2018 and prior)