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Overview

Introduction to silicon VLSI technology. Future trends in VLSI technology. Technology limitations. Basic technology modules include: crystal growth and wafer preparation; mask generation techniques; lithography; diffusion process; ion implantation; oxidation; etching techniques - wet etching and plasma etching; thin film deposition - epitaxial growth, chemical vapor deposition techniques, metallisation; clean … For more content click the Read More button below.

Course Outline

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ELEC9704 Course Outline

Fees

TypeAmount
Commonwealth Supported Students (if applicable)$1170
Domestic Students$4350
International Students$5730

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Pre-2019 Handbook Editions

Access past handbook editions (2018 and prior)
Pre-2019 Handbook Editions