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Overview

Interdisciplinary overview of MST (MicroElectroMechanical Systems - MEMS). Transducer definition: Sensors and Actuators. Micromachining techniques including silicon bulk micromachining, silicon surface micromachining, stiction problems, bonding processes, LIGA technique, micromachined mould template and electroplating, sealed cavity formation, stereolithography, chemical mechanical polishing for planarisation, electric discharge micromachining, laser micromachining, focused ion beam … For more content click the Read More button below.

Course Outline

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ELEC9703 Course Outline

Fees

TypeAmount
Commonwealth Supported Students (if applicable)$1170
Domestic Students$4350
International Students$5730

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Pre-2019 Handbook Editions

Access past handbook editions (2018 and prior)
Pre-2019 Handbook Editions